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Optical system |
||
Optical scheme |
Czerny-Turner (astigmatism–compensated in model MS5201i and model MS5204i) | |
Ports |
1 input, 2 outputs |
|
Wavelength range |
185 nm – 60 μm (depends on the type of grating) |
|
F-number (entrance) |
5.4 | |
Focal length (output) |
520 mm |
|
Scanning range (limited by grating rotation angle) |
0 – 1500 nm (grating 1200 l/mm) |
|
Main mirrors |
spherical |
|
Stray light |
1 х 10-6 |
|
Focal plane |
28 х 10 mm |
|
Imaging |
||
Horizontal magnification |
1.07 |
|
Vertical magnification |
1.29 (for MSO5201i and MSO5204i only) |
|
Vertical spatial resolution (minimal distance between the edges of the two nearby tracks |
< 20 μm (for MSO5201i and MSO5204i only) |
|
Drive |
||
Motor type |
stepper, with fractional steps |
|
Drive |
sine |
|
Step |
0.22 arc seconds |
|
Accuracy |
± 1 step |
|
Max. speed |
10 000 steps/s |
|
Ports |
||
Number of ports |
1 input, 2 outputs |
|
Output port repeatability (automated mirror) |
± 0.03 nm (for grating 1200 l/mm, wavelength 546 nm) |
|
Switching time (output port) |
4 s |
|
Optics |
||
Diffraction grating | 1200 l/mm, λ = 546 nm | Echelle 75 l/mm, λ = 200 nm, 120 order |
Reciprocal linear dispersion | 1.55 nm/mm | 0.11 nm/mm |
Spectral resolution: | ||
|
0.028 nm |
0.0020 nm |
|
0.034 nm |
0.0024 nm |
Wavelength repeatability |
± 0.007 nm |
± 0.0009 nm |
Wavelength accuracy |
± 0.034 nm |
± 0.0044 nm |
Average scanning step |
0.0017 nm |
– |
Scanning step at 200 nm |
– |
2.25 x 10-4 nm |
Gratings |
||
Size |
80 х 70 х 10 mm |
|
Rotation |
About the center of the grating working surface |
|
Mounting |
Automated 4-grating turret (models MSO5204, MSO5204i) |
Positioner for 1 manually changeable grating (models MSO5201, MSO5201i) |
Grating positioning repeatability: | ||
|
± 0.02 nm |
± 0.05 nm |
|
± 50 μm |
± 75 μm |
Control |
||
Central |
on-board CPU |
|
External |
PC |
|
External interface |
Ethernet |
|
Dimensions |
||
Overall sizes (LхWхH) |
635 х 339 х 270 mm |
|
Weight |
25 kg (may vary, depends on the configuration) |