The modern technologies in radio-electronics, cryogenic, laser, space techniques, medicine demand more and more high-purity gases, making more and more strict requirements under the concentration of the micro impurities. The technology of production of high-purity gases demands modern analytical methods both for operative control of the technological process and for quality assurance of raw materials, intermediate and end products.
The process mass
spectrometry is the method which allows solving problems of analytical control
at all stages of the high-purity gases production.